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超快激光剥离助力半极性面GaN基LED发展
在商用生产中,蓝宝石通常被用作氮化镓(GaN)外延生长的衬底。然而,由于GaN与蓝宝石之间存在显著的晶格失配(GaN和蓝宝石的晶格常数差异约为16%)和热失配,导致外延层中产生大量位错缺陷和其他结构缺陷。这些缺陷会严重影响GaN基器件的性能和可靠性。
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